Diamond Photodetector Response to Deep Uv Excimer Laser Excitation
نویسندگان
چکیده
Diamond photoconductive detectors have previously been shown to be suitable for detection of deep ultraviolet nanosecond-scale pulses from excimer lasers, which are to be used in next generation lithographic systems. Using simple test circuitry and low bias voltages easily measurable responses were observed when these detectors were illuminated with laser pulses at typical laser fluence levels. However, as the laser fluence is increased the detector response appears to broaden and change shape as well as increase in magnitude.
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